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Differential Pressure Sensor

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Compact Differential Pressure Sensor Using MEMS TechnologyEnables measurement of minute differential pressures via thermal flow technology.
Equipped with a 24-bit resolution ADC converter, It outputs high-accurate differential pressure as a digital value.

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Differential Pressure Sensor Parts List

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Parts

Associated Data

Supply
Voltage
Range
[V]

Operating
Temperature
Range
[deg.C]

Operating Range

Accuracy

Interface

Package Size
[mm]

MMS601 PDF 2.7 to 3.6 -20 to 80 -500 to 500[Pa], 0 to 250[Pa], -50 to 50[Pa] Zero point accuracy:±0.2Pa, Span accuracy:±3%RD I2C 26 x 18 x 24
MMS60X Product Catalog 3.0 to 3.6 -20 to 80 0 to 500Pa / 0 to 1,000Pa Zero point accuracy:±0.5Pa *TBD, Span accuracy:±3%RD *TBD I2C 15.2 x 15.2 x 8.9 *TBD

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