MMS50X

This product is a flow sensor using MEMS technology. The product mounts a ⊿ΣAD converter with a resolution of 24 bits and outputs a high-accuracy flow rate value as a digital value.

Outline

This product is a flow sensor using MEMS technology. The product mounts a ⊿Σ AD converter with a resolution of 24 bits and outputs a high-accuracy flow rate value as a digital value.

Air conditioner, Medical equipment
Mass flow rate measurement with thermal flow MEMS Chip.

Cariblated for	Air (no Condensation), Fuel gas
Supply Voltage Range [V]	3.0 to 3.6
Operating Temperature Range [deg.C]	-20 to 80
Operating Range	-250 to 250[L/m]
Current consumption [μA]	T.B.D
Accuracy	±5%RD(10% to 25%FS), ±3%RD(25% to 100%FS)
Resolution	24bit
Conversion Time [ms]	5
Interface	I2C