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Flow Sensor Differential Pressure Sensor

MMS60X

Outline

Compact Differential Pressure Sensor Using MEMS Technology Enables measurement of minute differential pressures via thermal flow technology.
Equipped with a 24-bit resolution ADC converter, it outputs highly accurate differential pressure as a digital value.

Applications

Air conditioner, Medical equipment

Features

Compact Differential Pressure Sensor Using MEMS Technology Enables measurement of minute differential pressures via thermal flow technology.

Main specifications

Cariblated for Air (no Condensation)
Supply
Voltage
Range
[V]
3.0 to 3.6
Operating
Temperature
Range
[deg.C]
-20 to 80
Operating Range 0 to 500Pa / 0 to 1,000Pa
Current
consumption
[μA]
T.B.D
Accuracy Zero point accuracy:±0.5Pa *TBD, Span accuracy:±3%RD *TBD
Resolution 24bit
Conversion Time
[ms]
5
Interface I2C

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Associated Data

  • Measuring both wind direction and velocity, with a 20 mm diameter.

    Measuring both wind direction and velocity, with a 20 mm diameter.

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