MMS60X

Compact Differential Pressure Sensor Using MEMS TechnologyEnables measurement of minute differential pressures via thermal flow technology.
Equipped with a 24-bit resolution ADC converter, It outputs high-accurate differential pressure as a digital value.

Outline

Compact Differential Pressure Sensor Using MEMS Technology Enables measurement of minute differential pressures via thermal flow technology.
Equipped with a 24-bit resolution ADC converter, it outputs highly accurate differential pressure as a digital value.

Air conditioner, Medical equipment
Compact Differential Pressure Sensor Using MEMS Technology Enables measurement of minute differential pressures via thermal flow technology.

Cariblated for	Air (no Condensation)
Supply Voltage Range [V]	3.0 to 3.6
Operating Temperature Range [deg.C]	-20 to 80
Operating Range	0 to 500Pa / 0 to 1,000Pa
Current consumption [μA]	T.B.D
Accuracy	Zero point accuracy：±0.5Pa TBD, Span accuracy：±3%RD TBD
Resolution	24bit
Conversion Time [ms]	5
Interface	I2C