Noise-Resistant
Compact with an Integrated Connector
No Calibration Required

Simply install it in the airflow path!
  • High-precision digital air velocity output
  • Easy detection of changes in airflow (air velocity)

Compact, Low-cost Digital Output Air Velocity Sensor: MMS651 Series

Air Velocity Sensor: MMS651 Series

Are you struggling with measuring air velocity or detecting changes in airflow?

・Do you want to achieve highly accurate air velocity measurement, but the cost is too high?
・Do you want to easily detect changes in airflow at a specific location without connecting piping?
・Limited measurement space restricts where sensors can be installed.
・Resources are being spent on calibration and peripheral circuit design, delaying your development schedule.

The MinebeaMitsumi MMS651 Series solves all these problems!

MinebeaMitsumi’s MMS651 Series flow sensors are single-axis airflow sensors (air velocity sensors) that utilize the Seebeck effect* to convert a temperature difference into voltage. Equipped with MEMS technology and a 16-bit ΔΣ ADC, it minimizes electrical noise (interference) to the greatest extent possible, delivering high-precision digital air velocity output. The compact design and integrated connector eliminate installation constraints, providing a low-cost, high-performance solution ideal for heating, ventilation, and air conditioning (HVAC) and filter-clogging detection in servers and other equipment.

*Seebeck effect: A phenomenon in which a potential difference is generated when two different metal wires are connected at both ends to form a loop and a temperature difference is applied at the junctions.

1. Three Features That Solve Your Problems

Three Features That Solve Your Problems
  • ① Resistant to electrical noise: Built-in 16-bit ΔΣ ADC provides high-precision digital output (I2C).
  • ② Flexible installation: Compact design with a connector-equipped structure. Size: 22.5 × 21.0 × 7.0 mm!
  • ③ No calibration required: Corrected digital values can be converted to air velocity values using a simple formula. This significantly reduces the resources required for peripheral circuit design and development time.
Download Documents

2. What Is the Secret behind the Internal Structure of the MMS651 That Enables it to Continuously Measure Air Velocity with High Accuracy?

The unique two-flow-path structure, which divides the interior into a main path and a sub flow path, reduces the amount of dust and dirt reaching the MEMS, enabling stable measurement over the long term.

The internal structure of the “MMS651,” which ensures high-precision wind speed measurements.

Inside the MMS651, air entering through the Inlet flows through the main path and is discharged through Outlet 1 and Outlet 2.
The key feature is the internal structure designed so that the airflow rate in the sub path is lower than that in the main path. This meticulous flow-path design physically suppresses the entry of dust and dirt into the sub path, where the MEMS chip essential for measuring air velocity is located. This helps prevent sensor deterioration and measurement errors caused by airborne dust, maintaining high measurement accuracy over the long term.

3. Specifications and Conditions

MMS651 Series Flow Sensor (Air Velocity Sensor) for highly accurate air velocity measurement in a compact, space-saving design with high resistance to environmental noise

MMS651 Series Flow Sensor (Air Velocity Sensor) for highly accurate air velocity measurement in a compact, space-saving design with high resistance to environmental noise
Main Specifications

スクロールできます

MMS651P01N1

MMS651P003N1

Applicable medium Air
Measurement range 0~10 m/s (*) 0~3 m/s
Accuracy ±5%R.D. (4.0 m/s ≦ air velocity ≦ 10 m/s)
±2%F.S. (0 m/s ≦ air velocity < 4.0 m/s)
±3%F.S. (0.3 m/s ≦ air velocity ≦ 3.0 m/s)
±7%F.S. (0 m/s ≦ air velocity < 0.3 m/s)
Supply voltage range 3.0~3.6 VDC
Operating temperature range -10 ℃ to 60 ℃
Resolution 16bit digital
Response speed 90msec.
Interface I2C
Size (mm) 22.5 x 21 x 7
* Customizable
Download Documents

4. Application Examples for Addressing Challenges: Benefits of Using Airflow Sensors (Air Velocity Sensors)

Airflow sensors (air velocity sensors) are actively used in many aspects of our everyday lives, often behind the scenes.
For example, they can be used in ventilation fans and VAV HVAC systems, as well as for detecting filter clogging in data center servers, projectors, and other equipment.

1) Ventilation fans / VAV (variable air volume control): Compliance with regulations (Ecodesign) and energy savings

Challenge

In response to recent Ecodesign-related regulations, there is a need to ensure the minimum effective ventilation volume while achieving energy savings.

Benefits

Installing the MMS651 in the ventilation path makes it possible to provide real-time feedback of the actual airflow to the controller. This enables optimization of exhaust efficiency and appropriate airflow control, contributing to energy savings and reduced noise.

Ventilation fans / VAV (variable air volume control): Compliance with regulations (Ecodesign) and energy savings
2)  Filter clogging detection (data centers / projectors): Optimizing maintenance

Challenge

In the past, filter clogging was estimated based on elapsed time, such as the time the equipment had been powered on. This created the risk of unnecessarily replacing filters that were still usable, while also creating the risk of thermal runaway if replacement was delayed too long.

Benefits

The degree of clogging can be quantified by directly measuring the air velocity downstream of the dust-proof filter. This makes it possible to replace the filter at the optimal time when the air velocity falls below the preset threshold, helping ensure equipment safety while reducing component costs.

Filter clogging detection (data centers / projectors): Optimizing maintenance

5. FAQ

What are the specific advantages of the MMS651 Series (digital output) compared with analog-output sensors?
With analog-output sensors, noise can easily be picked up along the PCB traces between the sensor and the microcontroller, creating a challenge in detecting small changes in air velocity.
The MMS651 incorporates a high-precision 16-bit ΔΣ ADC inside the IC and converts the signal to a digital signal (I2C) near the sensor before outputting it. This provides high resistance to electrical noise and enables stable output.
What causes the drift phenomenon, in which the measured air velocity gradually deviates during use, and how can it be addressed?
One of the main causes is that fine dust or oil mist in the air adheres to the surface of the sensor’s MEMS element, potentially changing its thermal conductivity over time.
As a countermeasure, install a filter with an appropriate level of filtration on the upstream side of the sensor to prevent physical contamination. In addition, if contamination does occur, perform periodic zero-point correction on the system side (implementing the calibration process in software). If you have any questions or concerns, please feel free to contact us.
Can the product be customized, such as by changing the flow-path shape or providing custom fixtures?
Yes, this is possible.
We have extensive experience providing customized solutions to accommodate the flow-path designs inside customers’ housing. Please feel free to let us know your requirements.