This product is a flow sensor using MEMS technology. The product mounts a ⊿Σ AD converter with a resolution of 24 bits and outputs a high-accuracy flow rate value as a digital value.
Air conditioner, Medical equipment
Mass flow rate measurement with thermal flow MEMS Chip.
|Cariblated for||Air (no Condensation), Fuel gas|
|Supply Voltage Range
|Operating Temperature Range
|Accuracy||±5%RD(10% to 25%FS), ±3%RD(25% to 100%FS)|