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Flow Sensor

Differential Pressure Sensor

This product is a small differential pressure sensor using MEMS technology. Thermal flow MEMS can be highaccuracy measurement with low preesure level.

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Parts Associated Data Supply Voltage Range
[V]
Operating Temperature Range
[deg.C]
Operating Range Accuracy Interface Package Size [mm]
MMS601PDF2.7 to 3.6-20 to 80-500 to 500[Pa], 0 to 250[Pa], -50 to 50[Pa]Zero point accuracy:±0.2Pa, Span accuracy:±3%RDI2C26 x 18 x 24
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