MMS601

Compact Differential Pressure Sensor Using MEMS TechnologyEnables measurement of minute differential pressures via thermal flow technology.
Equipped with a 24-bit resolution ADC converter, It outputs high-accurate differential pressure as a digital value.

Outline

This product is a small differential pressure sensor using MEMS technology. Thermal flow MEMS can be highaccuracy measurement with low preesure level.

Air conditioner, Medical equipment
High-accuracy measurement with low preesure level

Cariblated for	Air (no Condensation)
Supply Voltage Range [V]	2.7 to 3.6
Operating Temperature Range [deg.C]	-20 to 80
Operating Range	-500 to 500[Pa], 0 to 250[Pa], -50 to 50[Pa]
Current consumption [μA]	T.B.D
Accuracy	Zero point accuracy：±0.2Pa, Span accuracy：±3%RD
Resolution	24bit
Conversion Time [ms]	5
Interface	I2C