Flow Sensor Differential Pressure Sensor
MMS601
Outline
This product is a small differential pressure sensor using MEMS technology. Thermal flow MEMS can be highaccuracy measurement with low preesure level.
Applications
Air conditioner, Medical equipment
Features
High-accuracy measurement with low preesure level
Main specifications
| Cariblated for | Air (no Condensation) |
|---|---|
| Supply Voltage Range [V] |
2.7 to 3.6 |
| Operating Temperature Range [deg.C] |
-20 to 80 |
| Operating Range | -500 to 500[Pa], 0 to 250[Pa], -50 to 50[Pa] |
| Current consumption [μA] |
T.B.D |
| Accuracy | Zero point accuracy：±0.2Pa, Span accuracy：±3%RD |
| Resolution | 24bit |
| Conversion Time [ms] |
5 |
| Interface | I2C |
